NSF Center
for Nano and Micro-
contamination Control

Egan Research Center

Northeastern University
360 Huntington Avenue
Boston, MA 02115

phone: 617.373.6012
fax: 617.373.3266

4th Surface Cleaning Workshop

“Future and Current Challenges in Surface Cleaning”

November 6-8, 2006
Tutorial: November 6, 2006 at Northeastern University
Workshop: November 7-8, 2006, Colonnade Hotel, Boston
Evening Reception: November 7, 2006, Northeastern University

The agenda featured speakers from IBM, Intel, Sematech, Applied Materials, EKC/Dupont, IMEC, SEZ, Samsung, Semes, Sony, Northeastern University, Hanyang University, University of North Texas, and Purdue University.