NSF Center
for Nano and Micro-
contamination Control

Egan Research Center

Northeastern University
360 Huntington Avenue
Boston, MA 02115

phone: 617.373.6012
fax: 617.373.3266


Our Facilities: The George J. Kostas Nanoscale Technology and Manufacturing Research Center at Northeastern University

The facility includes a 10,000 square foot cleanroom. Our facility includes a complete six-inch wafer fabrication facility including bulk micromachining, metal surface micromachining and E-beam lithography. It also has a CMP tool (with end point detection), laser surface scanner, Laser airborne and liquid counter (200 nm resolution), CNC particle counters (10 nm resolution), Zeta potential measurement down to 1 nm particles, several cleaning tools, Atomic Force Microscope in addition to optical and FESEM.

  • 10,000 square foot cleanroom
  • Full six-inch wafer fab
  • Nanolithography System (E-beam, AFM) capable of making structures down to 20 nm
  • Bulk & metal surface micromachining
  • Laser surface scanner (200 nm res.)
  • Laser airborne counter (200 nm res.)
  • TSI CNC particle counters (2 nm res.)
  • PSIA XE150 Atomic Force Microscope
  • Nikkon Fluorescence microscope
  • Karl Ziess Supra 25 FESEM with EDS
  • Nanoparticle Zeta potential measurements
  • Surface energy and contact angle automated measurement
  • Zygo Surface Profiler
  • CMP tool with end point detection
  • Nanoimprint Lithography